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Publication Date: 09/1/2011
Archive >  September 2011 Issue >  New Products > 

Piezo Motor: Lower Profile Rotation Table from PI
Low profile rotation table.
Auburn, MA — PI (Physik Instrumente) L.P. has released a higher-precision version of its M-660 low profile rotary table. Driven by piezo motors which enable the very low profile of only 14mm (0.6in), the new model is equipped with a high accuracy direct measuring encoder and provides 8 times the position resolution of the existing version.

The rotary table can accelerate to velocities of 720°/sec. and its directly coupled precision optical encoder resolves positions down to 4µrad (0.00023°), providing phase-lag-free, backlash-free feedback to the servo controller. Its self-clamping ceramic drive provides very high stability, with no energy consumption at rest and no heat generation.

Applications include semiconductor test equipment, metrology, and optical instrumentation.

Mass and inertia were reduced significantly compared to conventional rotation stages, due to the lightweight direct-drive ceramic motor, operating without gears or magnets. The net result is very fast start/stop behavior, precise bidirectional speed and position control, which is critical for high speed motion contouring. According to the company, these features make the M-660 outperform the stability, acceleration and settling speed of traditional servo motor direct drives and gear-driven mechanisms.

A special motion controller for piezo motors is available to take full advantage of the specific motion characteristics of ultrasonic ceramic motors. USB interfacing and a solid software and driver package (LabView, Matlab, etc.) for seamless integration are included.

Contact: PI (Physik Instrumente) L.P., 16 Albert St., Auburn, MA 01501 508-832-3456 fax: 508-832-0506 E-mail: Web:

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