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Publication Date: 05/1/2011
Archive >  May 2011 Issue >  New Products > 

Tosoh Sputtering Targets Improve Solar Cells
TCO sputtering target.
Grove City, OH {?} Tosoh SMD, Inc., one of the group companies of Tosoh Corporation, has introduced new transparent conducting oxide (TCO) sputtering targets that achieve higher solar cell efficiency than standard targets. The new TCO targets are available in planar and rotary configurations and are composed of either traditional indium tin oxide (ITO) or aluminum zinc oxide (AZO). However, they are doped with performance-enhancing additives, so that thin films deposited from these targets have improved optical properties, in particular increased transparency. As a result, the conversion efficiency of solar cells in which such thin films are applied increases more than one point compared with solar cells using thin films from conventional TCO targets.

TCO targets for leading-edge thin film solar applications require a stringent combination of optical, electrical, and mechanical properties and the durability to meet manufacturers' lifetime expectations. These new TCO targets meet the requirements with films that are highly transparent, especially in the visible to infrared range, and that possess high thermal stability, even under humid conditions.

The TCO targets, moreover, enable the deposition of textured surfaces that provide enhanced light-trapping capability. Compared with thin films from conventional TCO targets, a single-junction thin film deposited by one of these targets in a silicon solar cell shows a one-point gain in conversion efficiency. Thin films, meanwhile, produced with the company's ITO TCO target achieve a similar gain in a copper indium gallium selenide (CIGS)-based solar cell.

Contact: Tosoh SMD, Inc., 3600 Gantz Road, Grove City, OH 43123 614-875-7912 fax: 614-875-0031 Web:

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