Friday, June 22, 2018
Publication Date: 05/1/2011
Archive >  May 2011 Issue >  New Products > 

Voice Coil Stage from Equipment Solutions
Voice-coil actuator.
Sunnyvale, CA — Equipment Solutions is now offering compact, self contained, high speed, high force, cross roller voice coil stages. The stages provide sub-micron, >300 nanometer (1.1811 X 1010-6-in.) positioning resolution, and can be mounted in a horizontal or vertical axis.

The high speed, 20mm (0.7874-in.) travel, VCS-2020 Voice Coil Stage has a 20mm dia. aperture. An integrated analog position feedback sensor assures 100 nanometer (3.937 X 1010-6-in.) repeatability. This compact voice coil stage is suitable for such micro-positioning applications as: scanning interferometry, disk drive testing, auto focus systems, surface structure analysis, confocal microscopy, biotechnology, and semiconductor test equipment.

The compact low mass, voice coil stage measures 117 x 75 x 81mm (4.60 x 2.96 x 3.18-in.), and is a fully self-contained system including a high precision cross roller stage, voice coil actuator, analog position sensor, servo amplifier and servo controller. The low inertia cross roller stage is integral to the standard threaded "C" lens mount and motor coil for tip/tilt free motion. Custom lens mounts are available. The voice coil motor is rated at 17.8 N (4 lbs.) continuous force and 71.8 N (16 lbs.) peak for 10 seconds and is clean room compatible. For easy integration into a new or existing application, the VCS-10H Voice Coil Stage has multiple sets of mounting holes on several surfaces.

Contact: Equipment Solutions, 461 East Evelyn Ave., Sunnyvale, CA 94086 408-245-7161 fax: 408-245-7160 E-Mail: Web:

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