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Aerotech Intros Two Nanopositioning Stages
Rotary nanopositioning stages.
Pittsburgh, PA — New from Aerotech, the ANT95-R and ANT130-R Nanopositioning Rotary Stages offer laboratory performance on a 24/7 production floor.

The stages reportedly provide sub-arc-second performance with 20°, 180°, or 360° continuous travel with 0.01 arc-second resolution 0.005 arc-second in-position stability. Maximum speed is 200 rpm and maximum acceleration is 400 rad/s2.

The direct-drive rotary stages are part of the company's nano Motion Technology product line. The stages are suitable for demanding high-throughput manufacturing applications such as disk-drive and MEMS manufacture and test, fiber-optic device alignment, as well as for super-high-precision laboratory R&D applications.

The rotary stages incorporate the company's unusual direct-drive for extremely smooth motion. Axial load capacity is 2kg for the ANT95-R and 3kg for the ANT130-R. The rotary stages also offer an 11mm clear aperture that can be used for product feed-through, laser beam delivery, cable clearance, or application-specific requirements. The stages are designed for compatibility and easy integration with the company's ANT linear stages. Together these stages provide the accuracy, stability, and performance required for current and future nanomanufacturing and inspection applications. Their low profile reduces the effective working height, minimizing "stack-up" related errors when used as part of a multi-axis system.

The ANT95-R and ANT130-R were designed to operate in a 24/7 manufacturing environment while providing laboratory-grade accuracy. Unlike other extremely precise rotary devices, they require no periodic maintenance.

Contact: Aerotech, Inc., 101 Zeta Dr., Pittsburgh, PA 15238 412-963-7470 fax: 412-963-7459 Web:
http://www.aerotech.com

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