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Tuesday, September 27, 2016
VOLUME -25 NUMBER 7
Publication Date: 07/1/2010
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Electrostatic Chuck Supply from Trek
Electrostatic chuck supply.
Medina, NY — Trek Model 645 is a software-driven amplifier (supply) for electrostatic wafer chucking (E-chucks). Various chucking/de-chucking profiles can be designed and uploaded to the Model 645 to optimize performance in an e-chuck process/facility.
This versatile amplifier/supply is designed to produce accurate clamp/de-clamp waveforms developed by the process engineer in order to maximize E-chucked wafer productivity.
Contact: Trek Inc., 11601 Maple Ridge Rd., Medina, NY 14103
800-367-8735 or 585-798-3140 fax: 585-798-3106 Web:
http://www.trekinc.com
See at Semicon West Booth #1731.
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