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Publication Date: 05/1/2008
Archive >  May 2008 Issue >  New Products > 

PI Adds Piezo Nanopositioning Stages
Piezo nanopositioning stages.
Auburn, MA — PI (Physik Instrumente) L.P. has extended its PIHera® family of flexure-guided piezo nanopositioning stages, now offering record travel ranges to 1.8mm. The precision closed-loop flexure-guided stages can be used for scanning probe applications (surface metrology) and static positioning. Long travel ranges permit scanning areas more than 200X larger than conventional piezo stages with typical ranges of 100 x 100µm.

Most PIHera stages provide sub-nanometer resolution and even the 1.8mm versions achieve 3nm resolution in closed-loop operation. The compact size is achieved with a new, friction-free and extremely stiff flexure system, which also provides fast response and excellent guiding accuracy.

According to the company, trajectory precision is in the low-nanometer range. High acceleration forces are provided by patented, long-life multilayer piezoelectric linear actuators. The ability to control motion with millisecond responsiveness and nanometer precision over long travel ranges makes PIHera stages suitable for measuring and QA applications.

The stages are equipped with non-contact capacitive-sensors and provide extremely linear motion with up to 99.98 percent accuracy and effective resolution in the sub-nanometer range. PI capacitive sensors are absolute-measuring, direct-metrology devices that boast very high bandwidth and exhibit no periodic errors.

Typical Applications include, surface metrology, quality assurance, scanning probe microscopy, nanometrology, interferometry, nanopositioning, nano-alignment/semiconductor technology.

Flexures, actuators and sensors are maintenance-free, providing longer lifetime with patented, ceramic-encapsulated piezo actuators; X, XY, Z and XYZ versions available; 50 to 1800µm travel ranges, nanometer resolution; closed-loop digital & analog control for up to 99.98 percent position accuracy; vacuum-compatible versions; stiff and compact design for millisecond responsiveness; frictionless, maintenance-free, precision flexure guiding system; direct-metrology sensors for faster servo response.

Contact: Physik Instrumente L.P., 16 Albert St., Auburn, MA 01501 508-832-3456 fax: 508-832-0506 E-mail: Web:

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