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Cognex Offers Vision-Based Wafer Pre-Alignment
Vision-based wafer pre-alignment system.
Natick, MA — Cognex Corporation has introduced the In-Sight® 1820 vision-based wafer pre-aligner. Utilizing proprietary Cognex NotchMax™ alignment technology, the vision system provides precise non-contact measurement of wafer position and orientation that is faster and more accurate than comparably priced mechanical systems. It determines wafer position and orientation in less than a half second while mechanical pre-aligners must typically spin wafers for several seconds.

NotchMax, the newest member of the Cognex family of geometric pattern finding technologies, aligns wafers with a center position accuracy of ±15µm and an orientation accuracy of ±0.05°. More accurate pre-alignment saves fine alignment steps inside a process tool to boost throughput.

According to the company, the new system can handle changing wafer sizes and types with simple parameter changes, while semiconductor fabs will like the non-contact design that minimizes wafer handling and potential damage to the wafer.

For more information, contact: Cognex Corp., One Vision Dr., Natick, MA 01760-2059 877-264-6391 or 508-650-3000 fax: 508-650-3333 Web: http://www.cognex.com

 
 

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