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View Intros Hi-Res Optical Measurement System
Hi-res optical measurement system.
Simi Valley, CA — View Micro-Metrology is introducing the Precis™ optical measurement system for highest resolution and accuracy industrial metrology applications. According to the company, Precis delivers exceptionally accurate point-to-point (PTP) and field-of-view (FOV) non-contact measurements of semiconductor, optoelectronic, and MEMS devices.

Based on sound metrology principles and using powerful image analysis algorithms, Precis provides FOV measurement down to 0.5µm with measurement accuracy of 0.010µm (10nm).

The instrument provides 200 x 200mm of high-precision XY stage travel. To ensure optimum stability, it has granite structural components and a vibration isolation support stand. Suitable for manual single measurements, the unit can also be programmed for fully automated measurement sequences.

Its high-resolution microscope optical system provides extremely accurate linewidth measurements. The Precis system offers: autofocus to precisely position the microscope at the best focus point by mathematically analyzing edge sharpness through a series of focus positions; auto-illumination automatically adjusts light intensity for best signal-to-noise ratio, providing maximum measurement repeatability; pattern recognition algorithms locate alignment features at lower magnification, and then automatically measure at high magnification for optimum precision and throughput.

For more information, contact: View Engineering, Inc., 1650 N. Voyager Avenue, Simi Valley, CA 93063 877-767-8439 or 805-578-5000 E-mail: info1@vieweng.com Web: http://www.viewengineering.com

 

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