Minneapolis, MN — New from CyberOptics Corporation (NASDAQ: CYBE) is its ReticleSense Airborne Particle Sensor (APSR) which is an extension of the wafer-shaped WaferSense Airborne Particle Sensor (APS) line that has been adopted by major semiconductor fabs and OEM equipment makers worldwide.
|WaferSense airborne particle sensor. |
To address the market demand for airborne particle measurement in 150mm semiconductor and gallium arsenide (GaAs) fabs in China, Europe, Japan, the U.S. and Taiwan, as well as LED fabs, the company has also extended its APS line to include a 150mm wafer form factor. With APS technology, equipment engineers can quickly and wirelessly monitor, identify and troubleshoot airborne particles in real-time within semiconductor process equipment and automated material handling systems. WaferSense and ReticleSense Airborne Particle Sensors enable equipment engineers to shorten equipment qualification, release to production and maintenance cycles all while reducing expenses. Customers have experienced up to 88 percent time savings, up to 95 percent reduction in costs, and up to 20X the throughput with half the manpower resource requirements using the WaferSense APS relative to legacy surface scan wafer methods. The WaferSense measurement portfolio including the Auto Leveling System (ALS), the Auto Gapping System (AGS), the Auto Vibration System (AVS), the Auto Teaching System (ATS) and the Airborne Particle Sensor (APS) are available now in 150mm, 200mm, 300mm and 450mm wafer sizes. The ReticleSense Airborne Particle Sensor (APRS) and ReticleSense Auto Leveling System (ALSR) products are available in a reticle shaped form factor.
Contact: CyberOptics Corporation, 5900 Golden Hills Dr., Minneapolis, MN 55416 763-542-5000 fax: 763-542-5100 E-mail: email@example.com Web: http://www.cyberoptics.com