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Trek Intros Hi-Performance Electrostatic Chuck Supply
Hi-performance electrostatic chuck supply.
Medina, NY — Trek, Inc. a designer and manufacturer of high-voltage amplifiers and electrostatic voltmeters, is introducing its newest Electrostatic Chuck Supply, the Model 646. The new unit offers a reliable, versatile solution for manufacturing environments where mechanical handling must be avoided, such as in semiconductor, photovoltaic/solar, and other electrostatic-driven handling processes.
The design of this new unit, with its dial-in performance, enables Model 646 to be utilized in multiple tools/processes, thus eliminating the need for a user to specify a new ESC supply for each unique tool/process in a manufacturing facility.
The new unit's technology has been documented to provide increased throughput, reduction of backside gas errors and virtual elimination of sticky wafer or wafer popping issues. The unit's wafer detection system enhances utility.
This new Electrostatic Chuck Supply is a software-driven, ±3kV amplifier-powered process optimization supply designed especially for electrostatic bi-polar semiconductor wafer chucking (E-chuck) systems. Its technology enables customer-specified chucking/de-chucking profiles to be uploaded to the unit with user-friendly software. The supply then generates the desired waveform voltages to enable optimized E-chuck performance in the user's process/facility. The Model 646 consists of two high voltage amplifiers and control circuitry. User-set parameters include over-current, wafer-present and wafer-clamped thresholds, clamp voltage, offset voltage, and internal or external amplitude/offset control.
Contact: Trek, Inc., 11601 Maple Ridge Rd., Medina, NY 14103
800-367-8735 or 585-798-3140 fax: 585-798-3106 Web:
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