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MKS Acquires Alter Power Systems
Andover, MA — MKS Instruments, Inc. has acquired Alter Power Systems S.r.l. of Reggio Emilia, Italy in a cash transaction. Alter develops advanced microwave power generators, components and systems for industrial microwave heating, microwave plasma coating and semiconductor applications. The Alter product portfolio includes a wide range of switch-mode magnetron power supplies with power levels up to 30kW at 2.45GHz, up to 75kW at 915MHz and 1kW at 5.8GHz.

Contact: MKS Instruments, 2 Tech Drive, Suite 201, Andover, MA 01810 978-645-5500 fax: 978-557-5100 E-mail: Web:

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