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ARCHIVE >  April 2013 Issue >  Electronic Mfg. Products > 

Precision Linear Stage from PI
Precision linear stage.
Auburn, MA — The new PI miCos MCS XY precision linear stage has been designed for industrial surface metrology/microscopy applications and combines robustness and high accuracy. This two-axis positioning system can handle loads to 45 lbs and still provide resolution as high as 5 nanometers and repeatability of 0.2µm because of its novel PIOne interferometric linear encoder. 1nm resolution is feasible with reduced maximum speed.

For use in such fields as optical inspection of precision machined parts, material research and topographical measurements in semiconductor/flat-panel design, excellent straightness of motion and high dynamics are also important. A large clear aperture of 150 x 150mm is beneficial in transmitted light applications.

The robust stage provides 102mm (4-in.) of positioning range in both axes and achieves ±2µm straightness/flatness of motion. Angular precision is also very good with yaw of only ±20µrad and pitch of ±40µrad.

Driven by the compact SMC Hydra motion controller from PI miCos, MCS stages achieve velocity ranges as low as 1µm/second all the up to 200mm/sec (8-in./sec).

Several motor and position feedback options are offered. For applications where closed-loop operation is not required, lower-cost open-loop stepper motors are offered. Several closed-loop versions are available for higher performance demands: stepper motors, DC servo motors and direct-drive electromagnetic noncontact linear motors.

The highest speed is available with the direct-drive linear motors. Extremely smooth motion, with constant velocity at the low end down to single digit microns/second is achieved with the company's miCos stepper motors and PI miCos motion controllers.

The MCS XY precision positioning stage can be combined with linear vertical stages, rotational stages and goniometric cradles as well.


Contact: PI (Physik Instrumente) L.P., 16 Albert St., Auburn, MA 01501 508-832-3456 fax: 508-832-0506 E-mail: info@pi-usa.us Web:
http://www.pi-usa.us

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